Product range:


innovative electron sources produced by EBID:

  • electron point sources
  • standard cold field emitters modified by EBID


 electrical nanostructures produced by EBID

  • ultrasmall nanoprobes
  • nanoscale electrical resistors
  • nanoscale electrical insulators


nanoscale and micrsocale electrically conductive structures:

  • fabrication by electron beam lithography
  • mix-and-match-technology
  • nanoscale areas contacted to mm sized pads


conventional cold field emitters for electron microscopes:

  • replacement / repair of defect W <310> cold field emitters


EBID manufacturing equipment:

  • gas injection system
  • e-beam lithography system for mix-and-match technology





nanoelectrotec - the combination of nanostructuration and vacuum electronics