Product range:
innovative electron sources produced by EBID:
- electron point sources
- standard cold field emitters modified by EBID
electrical nanostructures produced by EBID
- ultrasmall nanoprobes
- nanoscale electrical resistors
- nanoscale electrical insulators
nanoscale and micrsocale electrically conductive structures:
- fabrication by electron beam lithography
- mix-and-match-technology
- nanoscale areas contacted to mm sized pads
conventional cold field emitters for electron microscopes:
- replacement / repair of defect W <310> cold field emitters
EBID manufacturing equipment:
- gas injection system
- e-beam lithography system for mix-and-match technology
