precision positioning of EBID tip within few nanometers

precision positioning of an EBID tip on a W tungsten tip

 

 

 

 

 

 

 

 

 

tungsten hairpin wire with etched tungsten needle tip, length of needle is 1 mm

tungsten needle tip with EBID cold field emitter supertip on tungsten shpere, length of supertip 1 µm

top view onto tungsten sphere with EBID supertip

 standard tungsten hairpin wire with sharp tungsten needle having spherical end and EBID supertip for operation as cold electron field emitter, operating voltage is about 200 V.

left image: macroscopic view of tungsten needle

middle image: top of tungsten needle with EBID supertip, tilt angle 30 degree

right image: top view onto tungsten tip end with EBID supertip centered on tungsten sphere

 

 

 

EBID emitter in MEMS extraction opening, tilted view

EBID emitter in MEMS extraction opening, top view

 micrometer sized cold electron field emitter:

EBID emitter fabricated in MEMS extraction structure, operating voltage is about 100 V, 

MEMS structure fabricated in-house by e-beam lithography.

left image: extraction aperture in MEMS device with EBID emitter tip in the center, tilted view

right image: top view of EBID emitter centered in MEMS device extraction aperture

 

 

 

 

 

 

cone shaped EBID tip geometry for enhanced mechanical stability

precision conical shaped EBID tip on etched W tip

 

 

 

 

 

 

 

 

 

EBID tip in MEMS extraction structure

conical shaped EBID tip in an extraction opening produced by MEMS technology, MEMS structure provided by customer

 

 

 

 

 

 

 

 

EBID tip on Au conduction line, building an electron emitter on an electrically insulation substrate

 

 EBID tip in the center of a Au conduction line. Au conduction line is fabricated by e-beam lithography on a MEMS device.

 

 

 

 

nanoelectrotec - the combination of nanostructuration and vacuum electronics